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Integrated Device
- Junji ADACHI, Yutaka TAKEI, Munehisa TAKEDA, Atsushi YUSA (BEANS Laboratory,
Micromachine Center)
- 48.$B!!(BMEMS$B%W%m!<%V$H(BAl$BEE6K$H$N@\?(@-I>2A(B
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- 49.$B!!(BAuSn$B6&>=H>ED@\9g$K$h$C$F??6uIu;_$5$l$?(BSiC$B%@%$%d%U%i%`$rM-$9$kBQ?)@-??6u%;%s%5$N@_7W$H@=:n(B
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- 64.$B!!(BGrowth Behavior of Compounds during Reactive Diffusion between Sn-Pd
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- Masanori KAJIHARA,Koji MASUI(Tokyo Institute of Technology)
- 65.$B!!%m%8%s$H1t%U%j!<%O%s%@MQ6bB0$H$NH?1~$N;~4V!&29EY0MB8@-(B
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- 50.$B!!(B[$B9V1i(B] Development of Bio/Nano hybrid platform technology for measuring
cell functions and regenerative medicine
- Hidetoshi Kotera (Kyoto University), Atsuhito Okonogi, Kyohei Terao (CREST)
- 51.$B!!@EEEMFNL7?%8%c%$%m%;%s%5$N3+H/(B
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- 53.$B!!(BTSV(Through Silicon Via) interconnection on Wafer-on-a-Wafer(WOW) with
MEMS Technology
- Kosuke Suzuki, Koji Fujimoto(Dai Nippon Printing), Nobuhide Maeda, Hideki
Kitada(The University of Tokyo),Tomoji Nakamura(Fujitsu laboratories Ltd),
Takayuki Ohba(The University of Tokyo)
|
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